MEMS Design and Fabrication 1st Edition by Mohamed Gad el Hak ISBN 9781420036565 1420036564

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ISBN 10: 1420036564
ISBN 13: 9781420036565
Author: Mohamed Gad el Hak

MEMS Design and Fabrication 1st Edition Table of contents:

Materials for Microelectro-mechanical Systems

2.1 Introduction

2.2 Single-Crystal Silicon

2.3 Polysilicon

2.4 Silicon Dioxide

2.5 Silicon Nitride

2.6 Germanium-Based Materials

2.7 Metals

2.8 Silicon Carbide

2.9 Diamond

2.10 III–V Materials

2.11 Piezoelectric Materials

2.12 Conclusions

MEMS Fabrication

3.1 Wet Bulk Micromachining: Introduction

3.2 Historical Note

3.3 Silicon Crystallography

3.4 Silicon as Substrate

3.5 Silicon as a Mechanical Element in MEMS

3.6 Other Si Sensor Properties

3.7 Wet Isotropic and Anisotropic Etching

3.8 Etching with Bias and/or Illumination of the Semiconductor

3.9 Etch-Stop Techniques

3.10 Issues in Wet Bulk Micromachining

3.11 Computer Simulation Software

3.12 Wet Bulk Micromachining Examples

3.13 Surface Micromachining: Introduction

3.14 Historical Note

3.15 Mechanical Properties of Thin Films

3.16 Surface Micromachining Processes

3.17 Poly-Si Surface Micromachining Modifications

3.18 Surface Micromachining Modifications Not Involving Polysilicon

3.19 Comparison of Bulk Micromachining with Surface Micromachining

3.20 Materials Case Studies

3.21 Polysilicon Surface Micromachining Examples

LIGA and Micromolding

4.1 Introduction

4.2 LIGA — Background

4.3 LIGA and LIGA-Like Process Steps

4.4 Examples

X-Ray–Based Fabrication

5.1 Introduction

5.2 DXRL Fundamentals

5.3 Mold Filling

5.4 Material Characterization and Modification

5.5 Planarization

5.6 Angled and Reentrant Geometry

5.7 Multilayer DXRL Processing

5.8 Sacrificial Layers and Assembly

5.9 Application Examples

5.10 Conclusions

Acknowledgments

For Further Information

EFAB™ Technology and Applications

6.1 Introduction

6.2 Why EFAB?

6.3 EFAB™ Technology

6.4 EFAB™ Applications

Acknowledgments

Defining Terms

Single-Crystal Silicon Carbide MEMS: Fabrication, Characterization, and Reliability

7.1 Introduction

7.2 Photoelectrochemical Fabrication of 6H-SiC

7.3 Characterization of 6H-SiC Gauge Factor

7.4 High Temperature Metallization

7.5 Sensor Characteristics

7.6 Reliability Evaluation

Summary

Acknowledgments

Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide

8.1 Introduction

8.2 Fundamentals of High-Density Plasma Etching

8.3 Fundamentals of SiC Etching

8.4 Applications of SiC DRIE

Summary

Defining Terms

Polymer Microsystems: Materials and Fabrication

9.1 Introduction

9.2 Polymer Materials in MEMS

9.3 Polymer Microfabrication Techniques

9.4 Device Examples

9.5 Future Directions and Challenges

Optical Diagnostics to Investigate the Entrance Length in Microchannels

10.1 Introduction

10.2 Optical Diagnostics Metrology in Microscale Fluid Mechanics

10.3 Overview of

10.4 Entrance Length Measurement in Microchannel Flow

10.5 Extensions of the Technique

Microfabricated Chemical Sensors for Aerospace Applications

11.1 Introduction

11.2 Aerospace Applications

11.3 Sensor Fabrication Technologies

11.4 Chemical Sensor Development

11.5 Future Directions, Sensor Arrays, and Commercialization

11.6 Commercial Applications

11.7 Summary

Acknowledgments

Defining Terms

Packaging of Harsh Environment MEMS Devices

12.1 Introduction

12.2 Material Requirements

12.3 Wafer-Level Packaging

12.4 High-Temperature Electrical Interconnection System

12.5 Thermomechanical Properties of Die-Attach

12.6 High-Temperature Ceramic Packaging Systems

12.7 Discussion

Acknowledgments

Fabrication Technologies for Nanoelectro-mechanical Systems

13.1 Introduction

13.2 NEMS-Compatible Processing Techniques

13.3 Fabrication of Nanomachines: The Interface with Biology

13.4 Summary

Acknowledgments

Molecular Self-Assembly: Fundamental Concepts and Applications

14.1 Introduction

14.2 Molecule–Molecule Interactions

14.3 Molecule–Substrate Interactions

14.4 Applications of Functionalized Surfaces

14.5 Conclusions and Perspectives

Index

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