The MEMS Handbook 1st edition by Mohamed Gad el Hak ISBN 0849300770 978-0849300776
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Authors:Mohamed Gad-el-Hak , Series:Mechanical engineering [97] , Tags:Technology & Engineering; Nanotechnology & MEMS; Electronics; General; Mechanical; Industrial Design; Product; Materials Science; Electronic Materials; Table of Contents , Author sort:Gad-el-Hak, Mohamed , Ids:9781489977397 , Languages:Languages:eng , Published:Published:Aug 2002 , Publisher:Springer US , Comments:Comments:As miniaturization, batch fabrication, and integrated electronics rapidly enable the development of a broad range of smart products, MEMs, MOEMS, and NEMS are creating enormous opportunities for commerce and functionality. This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. The MEMS/NEMS HANDBOOK (Microelectromechanical Systems/Nanoelectromechanical Systems) covers all of the major topics within the subject including design methods, fabrication techniques, manufacturing methods, sensors and actuators, and Micro Optical Electro Mechanical Systems. The many applications of MEMS technology include computer devices, electronics, instrumentation, industrial process control, biotechnology, medicine, chemical systems, office equipment, and communications. More than 100 coauthors from nearly 20 countries present clearly written, self-contained, accessible and comprehensive contributions with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists. The remarkable breadth and depth of the topics spanning this diverse field require the 5-volume extent of this notable reference resource that is based on the work of an internationally recognized board of coauthors.
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ISBN 10: 0849300770
ISBN 13: 978-0849300776
Author: Mohamed Gad el Hak
The MEMS Handbook 1st Table of contents:
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Introduction to MEMS
1.1. Overview of MEMS Technology
1.2. History and Evolution of MEMS
1.3. Applications of MEMS
1.4. The Role of MEMS in Modern Technology
1.5. MEMS Manufacturing and Design Challenges -
Chapter 1: MEMS Materials
2.1. Material Properties for MEMS
2.2. Silicon-Based MEMS Devices
2.3. Non-Silicon MEMS Materials
2.4. Advanced Materials for MEMS Fabrication
2.5. Material Selection Criteria for MEMS -
Chapter 2: MEMS Fabrication Techniques
3.1. Lithography in MEMS Fabrication
3.2. Etching and Deposition Techniques
3.3. Bulk Micromachining vs. Surface Micromachining
3.4. Wafer Bonding and Packaging
3.5. Fabrication Process Integration -
Chapter 3: MEMS Sensors and Actuators
4.1. Overview of MEMS Sensors and Actuators
4.2. Types of MEMS Sensors (Accelerometers, Gyroscopes, Pressure Sensors, etc.)
4.3. Types of MEMS Actuators (Electrostatic, Piezoelectric, Thermal)
4.4. Signal Processing for MEMS Sensors
4.5. Design Considerations for MEMS Sensors and Actuators -
Chapter 4: MEMS Design and Simulation
5.1. Design Principles for MEMS Devices
5.2. Finite Element Analysis (FEA) in MEMS Design
5.3. Simulation of MEMS Structures and Behavior
5.4. Design for Reliability and Longevity
5.5. Prototyping and Testing MEMS Devices -
Chapter 5: MEMS Packaging and Integration
6.1. Packaging Technologies for MEMS Devices
6.2. Packaging Challenges for MEMS Sensors and Actuators
6.3. Hermetic Sealing and Environmental Protection
6.4. Integration of MEMS with Electronics
6.5. Reliability Testing and Quality Control -
Chapter 6: MEMS Microfluidics and Biotechnology
7.1. Microfluidic MEMS Devices
7.2. MEMS in Medical and Biotech Applications
7.3. Lab-on-a-Chip (LOC) Technologies
7.4. Applications in Diagnostics and Therapeutics
7.5. Challenges in Microfluidics and Biotech Integration -
Chapter 7: MEMS in Telecommunications and Consumer Electronics
8.1. MEMS in Communication Systems (RF MEMS)
8.2. MEMS-Based Actuators for Optical Devices
8.3. MEMS in Consumer Electronics (Microphones, Haptic Feedback)
8.4. MEMS Integration in Smart Devices
8.5. Market Trends and Future Applications -
Chapter 8: MEMS for Automotive and Aerospace Applications
9.1. MEMS Sensors in Automotive Systems
9.2. MEMS Actuators for Automotive Control
9.3. MEMS in Aerospace: Inertial Sensors and Navigation
9.4. MEMS in Aircraft Safety and Control Systems
9.5. Emerging MEMS Technologies for Aerospace -
Chapter 9: MEMS Reliability and Testing
10.1. Reliability Issues in MEMS Devices
10.2. Failure Mechanisms in MEMS
10.3. Testing Methods for MEMS Performance
10.4. Accelerated Life Testing
10.5. MEMS Failure Analysis and Mitigation -
Chapter 10: The Future of MEMS
11.1. Emerging MEMS Technologies and Innovations
11.2. MEMS in IoT and Smart Cities
11.3. MEMS and Artificial Intelligence
11.4. The Role of MEMS in Sustainable Technologies
11.5. Future Market and Industry Outlook
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