Micro Electro Mechanical System Design 1st Edition by James Allen ISBN 0824758242 9780824758240

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Product details: 
ISBN 10: 0824758242 
ISBN 13: 9780824758240
Author: James Allen

It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved, how they are interrelated, and how they can be quickly and accurately addressed.

The materials are presented in logical order relative to the manner a MEMS designer needs to apply them. For example, in order for a project to be completed correctly, on time, and within budget, the following diverse yet correlated issues must be attended to during the initial stages of design and development:

• Understanding the fabrication technologies that are available
  
• Recognizing the relevant physics involved for micron scale devices
  
• Considering implementation issues applicable to computer aided design
  
• Focusing on the engineering details and the subsequent evaluation testing
  
• Maintaining an eye for detail regarding both reliability and packaging

  These issues are fully addressed in this book, along with questions and problems at the end of each chapter that promote review and further contemplation of each topic. In addition, the appendices offer information that complement each stage of project design and development.

Micro Electro Mechanical System Design 1st Edition Table of contents:

Section 1: Introduction to MEMS

1. Overview of Micro Electro Mechanical Systems (MEMS)
2. Historical Development of MEMS Technology
3. Applications of MEMS in Various Industries

Section 2: Fundamentals of MEMS
4. Principles of Microfabrication
5. Materials Used in MEMS
6. Mechanical Properties of Micromaterials

Section 3: Design Methodologies
7. MEMS Design Process and Methodologies
8. Computer-Aided Design (CAD) for MEMS
9. Multiphysics Simulation in MEMS Design

Section 4: MEMS Components and Structures
10. Sensors: Types and Applications
11. Actuators: Design and Performance
12. Microstructures: Beams, Plates, and Membranes

Section 5: Fabrication Techniques
13. Photolithography and Micromachining
14. Bulk Micromachining and Surface Micromachining
15. Advanced MEMS Fabrication Techniques

Section 6: Electronics and Signal Processing
16. Integration of MEMS with Electronics
17. Signal Conditioning and Data Acquisition
18. Power Considerations in MEMS Devices

Section 7: Testing and Packaging
19. MEMS Device Testing and Characterization
20. Packaging of MEMS Devices
21. Reliability and Failure Analysis

Section 8: Advanced MEMS Technologies
22. Optical MEMS (MOEMS)
23. BioMEMS and Medical Applications
24. RF MEMS for Wireless Communication

Section 9: Case Studies and Practical Applications
25. MEMS in Automotive Systems
26. MEMS in Consumer Electronics
27. Industrial Applications of MEMS

Section 10: Future Trends in MEMS
28. Emerging MEMS Technologies
29. Challenges in Scaling and Commercialization
30. The Future of MEMS in Industry 4.0

Section 11: Appendices

• Glossary of MEMS Terms
• Important Equations and Design Data
• Bibliography and Further Reading

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